Sub-Fab Projects

Sub-Fab Solutions

Inert Gas Supply Systems

This Inert Gas Supply System ensures uninterrupted gas supply through the following features:

Component Integration: Includes diaphragm valves, pressure regulators, front and rear filters, pressure displays, and electronic scales.
Automated Control: Features automated purging capabilities tailored to different gas properties with integrated electronicscales, heating units, etc.
Operational Modes: Can be equipped with fully automated or semi-automated control systems.

Valve Manifold Boxes and Panels

Multi-Point Delivery: When multiple gas outlets are needed, the system employs VMB (for specialty gases) or VMP (for inert gases) for gas diversion.
Pressure Control: Branch flow pressure is individually adjusted to meet the specific process requirements of each customer.
Delivery Method: Gas is transported to each gas point of the process equipment after pressure adjustment.
Key Functions:
- Gas Diversion
- Independent Pressure Regulation for Each Branch
- Separate Control
- Remote Shutdown of Main Pipeline (Manual)
- Remote Shutdown of Branch Pipelines (Manual)

Corrosive, Toxic, and Flammable Gas Supply Systems

This system prioritizes high safety in its design and incorporates the following features:

Material Selection: Cabinet materials are carefully selected based on the specific properties of the gases to ensure compatibility and prevent corrosion.
Safety Features:
- Standard Pressure Reducing Devices
- Automatic Switching for uninterrupted gas supply
- Automated Purging for safety and efficiency
- Vacuum Generator for safe cylinder changeouts
- Terminal Filters to remove impurities
- Emergency Shut-off valves for rapid response in case of emergencies
- Leakage Detection systems for enhanced safety
- Supply Pressure Monitoring for continuous system health checks
- Fire Sprinkler and Heat Tracing systems (as needed) to mitigate potential hazards
Control Options: Can be equipped with either automatic or semi-automatic control systems to meet customer requirements.

Slurry, Chemical Mixing Supply Systems

1: Dilution and Multi-Chemical Blending Systems

This system is designed to dilute single components like slurry, DHF, TMAH, DKOH, SC-1, SC-2, and SPM, and blend multiple components. It relies on mass flow meters, titrators, and concentration meters to precisely measure and control the blending process, ensuring a stable supply based on system requirements and fluid properties."

2: Chemical Delivery Systems

The system consists of a tank truck, a central control cabinet (CCB), a storage tank or daily tank, a chemical delivery module (CDM), liquid conveying pipelines, a TBOX valve box, and a VMB distribution valve box."

This system is responsible for:

Transporting liquids: The tank truck brings the liquids to the facility.
Storage: The storage or daily tank holds the liquids until needed.
Distribution: The CDM, pipelines, TBOX, and VMB work together to distribute the liquids to various points in the system.
Control: The CCB is the central control unit that oversees all operations.

Large Volume Specialty Gas Supply Systems

Large-capacity special gas packaging currently includes Y-cylinders, T-Ton cylinders, Tube Trailers, and ISO Tanks. The optimal conveying method is selected based on customer requirements.

For low-boiling point gases (e.g., NH3, N2O, HCL, SF6), electronic scales (weighbridges) are essential.

To ensure stable conveyance, the system incorporates appropriate heating methods based on thermodynamic calculations to mitigate phase transitions and the Joule-Thomson effect.